Fabrication and properties of the He+-implanted K9 glass waveguide

This work reports on the fabrication and characterization of a K9 glass planar waveguide structure. The helium ion implantation was employed to form the waveguide on the K9 glass. The choices of the energy of 0.4 MeV and the dose of 6.0 x 10(16) ions/cm(2) were conducted by the SRIM 2013. The m-line spectroscopy and the modal profile of the He+-irradiated K9 glass waveguide were performed by the prism-coupling system and the end-face coupling technique at 0.6328 mu m, which suggests the capability of light propagation. The He+-implanted K9 glass waveguides can serve as potential candidates for advanced integrated optoelectronic devices.