Piezoelectric benders with strain sensing electrodes: Sensor design for position control and force estimation

Sensors and Actuators A: Physical(2022)

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摘要
•Integration of strain gauges into piezoelectric bender electrodes.•Detailed dynamic modelling of the strain gauge response.•Design of a position controller.•Experimental validation showing excellent position control performance and the ability to measure contact forces.•Applications include micro-grippers and pneumatic valves.
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关键词
Piezoelectric bender,Position control,Force sensing
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