Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

JAPANESE JOURNAL OF APPLIED PHYSICS(2022)

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摘要
This paper discusses the applicability of double busbar design to surface acoustic wave (SAW) devices employing low-cut lithium tantalate (LT) with a multi-layered structure. This design offers good energy confinement, scattering loss suppression and transverse mode suppression for a wide frequency range. In addition, the effectiveness of manipulating the slowness curve shape for transverse mode suppression is demonstrated. First, three different lateral edge designs are applied to the layered SAW configuration on low-cut LT, and their performances are compared using the periodic three-dimensional finite-element method powered by the hierarchical cascading technique. Then, the discussion is extended to the influence of the SAW slowness shape to the transverse mode suppression.
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关键词
double busbar, SAW, lithium tantalate, slowness
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