Hybrid optical measurement system for evaluation of precision two-dimensional planar stages

•Hybrid optical measurement system was developed for evaluation of 2D planar stages.•Hybrid sensor module can be operated as a profile interferometer or an angle sensor by switching data-processing mode.•Multiple performance indices of 2D planar stage can be evaluated without reconfiguration of the setup.•Straightness and angular motion errors were measured with expanded uncertainty (k = 2) of 40 nm and 0.14″, respectively.•The proposed system would be applied to on-machine calibration effectively.