A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

Journal of Microelectromechanical Systems(2022)

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摘要
This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 $\mu \text{V}/\surd $ Hz, and a resolution of 0.23 pN/ $\surd $ Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018]
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关键词
Blue-sideband actuation,magnetometer,double-ended tuning fork,Lorentz-force
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