Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization

Micropumps are microelectromechanical system (MEMS) devices that pump small quantities of liquids. They are used in many applications such as electronics cooling and drug delivery. Valveless fluid diode micropumps with no moving parts have recently attracted great interest in the MEMS community. In this paper, topology optimization is used to design two-dimensional, fixed-geometry, fluidic diodes ...