Comparison in dynamic primary calibration of digital-output accelerometer between CEM and PTB

B. Seeger,E. Jugo, A. Bosnjakovic, S. Ruiz, Th Bruns

METROLOGIA(2022)

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摘要
In the framework of the EU-funded project Met4FoF Metrology for the Factory of the Future a method was developed to perform primary magnitude and phase calibration of accelerometers. The validation of the developed associated hard- and software, which is designed to complement conventional primary calibration systems, is demonstrated based on a comparison measurement between the project partners CEM and PTB. The results show that the statistical distribution of results is only a minor contribution to uncertainty. An evaluation of the comparison based on the conventional procedure and established CMCs proofed a good consistency between the two laboratories, although the utilized sensor was (only) industrial grade quality.
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关键词
digital sensors, MEMS, international comparison, laser interferometry, primary calibration
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