Comparison in dynamic primary calibration of digital-output accelerometer between CEM and PTB
METROLOGIA(2022)
摘要
In the framework of the EU-funded project Met4FoF Metrology for the Factory of the Future a method was developed to perform primary magnitude and phase calibration of accelerometers. The validation of the developed associated hard- and software, which is designed to complement conventional primary calibration systems, is demonstrated based on a comparison measurement between the project partners CEM and PTB. The results show that the statistical distribution of results is only a minor contribution to uncertainty. An evaluation of the comparison based on the conventional procedure and established CMCs proofed a good consistency between the two laboratories, although the utilized sensor was (only) industrial grade quality.
更多查看译文
关键词
digital sensors, MEMS, international comparison, laser interferometry, primary calibration
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要