A NOVEL HIGH SENSITIVE MODE-LOCALIZATION MEMS ELECTRIC FIELD SENSOR BASED ON CLOSED-LOOP FEEDBACK

This paper presents a novel high sensitivity mode localization micro electric field sensor based on closed loop feedback. The sensor is based on the principle that the mode localization effect can dramatically increase the sensitivity of a resonant system. Moreover, in order to detect the electric field in real time and improve the ability of the sensor, a closed-loop feedback is introduced. One of the output signals of the sensor is fed back to the input, where the output signal has been processed by phase locked loop part and automatic gain control part. Tested in vacuum conditions, the minimum detectable DC electric field of the sensor is better than 10V/m, the accuracy of the sensor is 5.3%, and the repeatability is 0.56%.