Inorganic molecular crystals for 2D electronics

Yury Yu. Illarionov,Theresia Knobloch,Tibor Grasser

NATURE ELECTRONICS（2021）

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摘要

Inorganic molecular crystal films of antimony trioxide can be grown on 4-inch wafers via a thermal evaporation process and used as a top-gate oxide in two-dimensional molybdenum disulfide transistors.

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关键词

Electronic devices,Electronic properties and materials,Two-dimensional materials,Electrical Engineering

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