Highly sensitive flexible modulus sensor for softness perception and clinical application

JOURNAL OF MICROMECHANICS AND MICROENGINEERING(2022)

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摘要
The wearable sensors for softness measuring are emerging as a solution of softness perception, which is an intrinsic function of human skin, for electronic skin and human-machine interaction. However, these wearable sensors suffer from a key challenge: the modulus of an object can not be characterized directly, which originates from the complicated transduction mechanism. To address this key challenge, we developed a flexible and wearable modulus sensor that can simultaneously measure the pressure and modulus without mutual interference. The modulus sensing was realized by merging the electrostatic capacitance response from the pressure sensor and the ionic capacitance response from the indentation sensor. Via the optimized structure, our sensor exhibits high modulus sensitivity of 1.9 x 10(2) in 0.06 MPa, a fast dynamic response time of 100 ms, and high mechanical robustness for over 2500 cycles. We also integrated the sensor onto a prosthetic hand and surgical probe to demonstrate its capability for pressure and modulus sensing. This work provides a new strategy for modulus measurement, which has great potential in softness sensing and medical application.
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关键词
modulus, pressure sensor, electronic skin, multimodal sensing
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