Modulating the blue and green luminescence in the β-Ga2O3 films

JOURNAL OF ALLOYS AND COMPOUNDS(2022)

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摘要
•The blue and green emission in β-Ga2O3 were modulated by intrinsic defects.•Green emission in β-Ga2O3 film originated from isolated gallium vacancies.•Isolated oxygen vacancies can’t play the role in blue emission independently.•Blue emission resulted from complex oxygen-defects.
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关键词
Ga (2) O (3) films, Luminescence, Density functional theory, Oxygen flow rate, Intrinsic vacancies
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