Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 PatternsMattia Pasquali,Patrick Carolan,Stefanie Sergeant,Johan Meersschaut,Valentina Spampinato,Thierry Conard,Alessandro Viva,Stefan De Gendt,Silvia ArminiACS Applied Electronic Materials(2022)引用 7|浏览25暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要