Research on Valveless Piezoelectric Micropump Based on COMSOL and 3D Printing Technology

Abstract In order to make the output flow of the valveless micropump larger and obtain continuous pumping capacity, a valveless piezoelectric micropump with a combination of V-shaped structure inlet and Y-shaped structure outlet is designed, which saves the design and installation of microvalve and makes the structure relatively simple and easy to process. In this paper, first, the operating principle of the valveless piezoelectric micro pump is analyzed; secondly, COMSOL simulation software was used to perform modal analysis on the drive and the appropriate vibration mode was obtained. The displacement trend of the piezoelectric vibrator was simulated and tested at the frequency of 40 Hz and different voltages; finally, 3D printing technology was used to produce an experimental prototype of the micro-pump, and t the specific size of the micro pump is 20 mm×20 mm×6 mm. The test results show that, driven by AC voltage, the discharge liquid of the valveless piezoelectric micropump can reach 658.8μl/min.