Effect of Atmosphere During Deposition on the Morphology, Mechanical Properties and Microfriction of Zr-Based Coatings

Zr-based coatings are multifunctional materials and very perspective in macro- and microtechnics as protective and tribological coatings. ZrN and ZrCN coatings were deposited on steel substrates by reactive magnetron sputtering at the constant magnetron power of 700 W and at the substrate bias voltage of − 10 V with different nitrogen or acetylene flow rate. The surface investigations were carried out using scanning electron microscopy, atomic force microscopy, nanoindentation and glancing angle X-ray diffraction. Tribological tests in the condition of microcontact were carried out using atomic force microscopy under ambient temperature and humidity controlled conditions. It was found that the mechanical and tribological properties and the size of grains in the polycrystalline ZrN and ZrCN coatings can be controlled using different gas flows.