Influence of Nanofabrication Errors on Optical Metasurfaces Performances: Study and Minimization Strategies

Adelin Patoux,Gonzague Agez,Christian Girard,Vincent Paillard,R. Wiecha Peter,Aurélie Lecestre,Franck Carcenac,Guilhem Larrieu,Arnaud Arbouet

OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)（2021）

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摘要

Through simulation design, fabrication and characterization of optical sili- con metasurfaces, we discuss the influence of different nanofabrication errors and propose strategies to optimize the robustness of the fabrication of complex metasurfaces. [1]

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