Testing and Characterization of Guided Beam Piezoelectric Energy Harvester

Energy Systems in Electrical EngineeringDesign and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester(2021)

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摘要
This chapter presents testing and characterization for guided two-beam and four-beam P-VEH. Structural characterization for the device has been done using XRD, SEM and AFM to determine the phase orientation of materials, surface morphology, topological view and surface roughness of the deposited films. A laser Doppler vibrometer has been used to determine the resonance frequency of the devices. Resonance frequency of the two-beam device comes at 466 Hz, and for the four-beam device, resonance frequency is 515 Hz. Vibration shaker test using SPEKTRA SE-10 is performed to measure the output potential generated at a given acceleration on two-beam and four-beam devices. In the low-frequency domain (10–1000 Hz), two-beam and four-beam devices exhibit net sensitivities of 2.2784 mV/m/s2 and 4.09272 mV/m/s2, respectively.
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关键词
piezoelectric,beam
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