Low-noise Delta-Sigma Analog Front End with Capacitor Swapping Technique for Capacitive Microsensors

In this paper, low-noise incremental delta–sigma analog front end (AFE) integrated circuit (IC) for capacitive microsensors is presented. A conventional capacitance-to-digital converter (CDC) mainly uses a multi-stage capacitive sensing amplified stage (CSA) and analog-to-digital converters. The multi-stage CSA is not suitable for application in various Internet of things (IoT) devices that require low power because the power consumption of the analog front-end circuit increases in proportion to the number of amplifiers and the chip area increases. So, the presented delta-sigma AFE can convert the capacitance changes to the digital codes directly. This structure can achieve a small active area and low power consumption. The delta–sigma AFE achieves low-noise and high linearity using a capacitor polarity swapping technique. The measured effective resolution is 16.2 bits, and the non-linearity is 0.05% full-scale output (FSO). The integrated circuit is implemented in a 0.18-µm standard CMOS process. All functional blocks, including the analog circuits (bandgap reference, voltage reference, and delta–sigma capacitance-to-digital converter) and digital block (accumulator and timing generator), are integrated on a chip. The proposed incremental delta–sigma AFE consumes 1.12 mW of power from a 3.3-V supply at a sampling frequency of 500 kHz and occupies a total active area of 0.42 mm 2 .