Influence of Multiple-Elastic-Scattering Processes in Multicomponent Targets on the Intensity of the Peaks of Elastically Reflected Electrons

A solution to the boundary problem for describing the formation of peaks of electrons elastically reflected from multicomponent samples is presented. It is shown that the problem leads to Lyapunov-type equations and allows the construction of an effective numerical solution. A small-angle theory for the elastic reflection of electrons from multicomponent materials is developed, which makes it possible to obtain analytical solutions that describe the intensity of the peaks of electrons reflected from various target components. A method is developed for interpreting and quantitatively processing the peaks of elastically reflected electrons, taking into account multiple scattering effects.