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Fabrication and Grinding Performance of CVD Diamond Abrasive Tool

Proceedings of the Institution of Mechanical Engineers Part B, Journal of engineering manufacture(2022)

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摘要
The chemical vapor deposition (CVD) method has become a new choice for the fabrication of diamond grinding tools with excellent wear resistance. Different diamond abrasive particles were deposited on the lapping and sandblasting pretreated silicon nitride ceramic substrate by hot filament chemical vapor deposition (HFCVD) method to fabricate CVD diamond abrasive tools. To analyze the influence of pretreatment methods on adhesion strength, the micromorphology, surface roughness, Raman stress, and Rockwell indentation of CVD diamond abrasive tools with different parameters were characterized. Meanwhile, grinding tests on cemented carbide wire drawing dies were carried out, and the grinding performance of different abrasive particles was evaluated. The results show that sandblasting pretreatment can increase the matrix surface roughness, accelerate the growth of diamond abrasive particles and improve the adhesion between the abrasive layer and substrate, and the CVD diamond grinding tool with sandblasting pretreatment substrate and coarse particle has the best dust removal ability and the longest grinding life. The cemented carbide grinding tests of the CVD diamond grinding tool and electroplated diamond grinding tool with the same particle size are processed and compared, it shows that the grinding life of the CVD diamond grinding tool is longer, and the surface roughness value of the workpiece is lower than that of the electroplated diamond grinding tool.
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关键词
HFCVD method,sandblasting pretreatment,diamond abrasive tool,grinding process,surface roughness
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