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A method to fabricate nanoscale gaps in graphene nano-constrictions by electrical breakdown

AIP ADVANCES(2022)

Cited 5|Views15
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Abstract
This work reports on a method to open nanoscale gaps in h-shaped graphene nano-constrictions by electrical breakdown at room temperature and pressure below 10(-5) mbar. The method was validated on 275 devices, fabricated on eight different chips, using Chemical Vapor Deposition (CVD)-grown graphene from in-house production and from two commercial sources. The gap width was estimated by fitting the I-V traces after electrical breakdown with the Simmons model for the intermediate-voltage range. The statistics on the collected data demonstrates that the method results in normally distributed nanoscale gaps in h-shaped graphene nano-constrictions, with an estimated average width centered around 1 nm and a gap fabrication yield of 95%. (C) 2022 Author(s).& nbsp;
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Key words
nanoscale gaps,electrical breakdown,nano-constrictions
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