Femtosecond Laser Direct Writing of Optical Overpass

MICROMACHINES(2022)

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摘要
With the rapid increase in information density, problems such as signal crosstalk and crossover restrict the further expansion of chip integration levels and packaging density. Based on this, a novel waveguide structure-photonic jumper wire-is proposed here to break through the technical restrictions in waveguide crossing and parallel line wrapping, which hinder the integration of photonic chips. Furthermore, we fabricated the optical overpass to realize a more complex on-chip optical cross-connection. Our method and structure promote a series of practical schemes for improving optical chip integration.
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关键词
femtosecond laser direct writing, polymer, photonic jumper wire, optical overpass
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