Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Shota Sota, Koichiro Handa,Takasumi Tanabe,Yoshinori Uzawa,Kentaro Furusawa,Norihiko Sekine

Conference on Lasers and Electro-Optics（2022）

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摘要

We report frequency comb generation in a silicon nitride (SiN) based microring resonator fabricated by the hot-wire chemical vapor deposition (HW-CVD) method with an intrinsic quality factor in excess of 5×105.

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关键词

frequency comb generation,silicon nitride microring resonator,hot-wire chemical vapor deposition,intrinsic quality factor,SiN

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