Considerations for Silicon Photonics Process Technologies in a Commercial Foundry Environment

2022 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)(2022)

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摘要
Aspects of silicon photonics process technologies intended for high volume production in a traditional silicon electronics-driven foundry environment are discussed. Both technological and economical challenges associated with this juxtaposition of a complex, non-standard process technology, inside of a factory geared for producing thousands of standardized electronics-based wafers per month, are described in detail.
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关键词
silicon photonics process technologies,economical challenges,silicon electronics-driven foundry environment,Si
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