One-axis-oriented growth of PZT thin films on transparent glass substrates using metal oxide nanosheets
JAPANESE JOURNAL OF APPLIED PHYSICS(2022)
摘要
Aiming at applications of ferroelectric and optical devices, we investigated the fabrication of one-axis-oriented lead zirconate titanate Pb(Zr,Ti)O-3 (PZT) thin films on glass substrates with a processing temperature below the glass-transition point of the substrate. Chemical solution deposition (CSD)-derived PZT thin films with a preferential crystal orientation of (00l)/(h00)PZT were grown on an ITO/glass substrate with a crystalline buffer layer of calcium niobate Ca2Nb3O10 (ns-CN). This ns-CN buffer layer lowered the crystallization temperature of the CSD-derived thin films, resulting in crystalline PZT thin films with one-axis (00l) orientation and ferroelectricity of P (r) = 4 mu C cm(-2) deposited on transparent glass substrates at a crystallization temperature of 500 degrees C.
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关键词
ferroelectrics, PZT, chemical solution deposition, thin films, crystal orientation, nanosheet, optical transmittance
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