Deposition and characterization of silicon thin film on stainless steel by electron beam evaporation

Sang-Hun Lee,Mansoo Choi,Yang-Il Jung,Seong-Ju Sim,Jei-Kwon Moon,Jihoon Choi,Seonbyeong Kim

Thin Solid Films（2022）

引用 3|浏览5

暂无评分

摘要

•SiOx thin film was obtained by electron beam deposition of Si and subsequent annealing.•The annealed SiOx thin film electrode exhibits a long-term cycle stability.•The inter-layer between Si film and substrate enhances cyclability of the electrode.

查看译文

关键词

Silicon thin film,Stainless steel,Lithium-ion battery,Annealing,Charge capacity

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要