High sensitivity and integration nanobeam cavities for the bio-sensing application at 1310 nm
Optics Communications(2022)
摘要
The optical sensor around 1310 nm is an important choice in the next generation photonic integration application. However, the application is hardly developed with a low-index-mode photonic crystal nanobeam cavity (PhCNC). A high sensitivity and integration one dimensional low-index-mode PhCNC is proposed, which consists of a host waveguide and elliptical-shaped holes. To confine the light into the low-index region of the cavity, the width of the host waveguide is decreased quadratically from the center to two sides in the tapered region. Through three dimensional finite-difference time-domain simulation, the TE-like electric field is strongly located in the elliptical-shaped holes, achieving high quality factor and sensitivity. The simulation results indicate that the highest quality factor is about 8 × 105. To demonstrate the performance, the proposed structure is fabricated and measured. The experimental results indicate that a high sensitivity of 390.4 ± 4.2 nm/RIU is achieved, thus showing a potency for on-chip bio-sensing with respect to high sensitivity and small footprints in environment monitoring.
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关键词
Photonic crystal,Nanobeam cavity,Sensor
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