Liquid Metal Based Flexible Electronics Fabricated by Laser and its Applications br
Chinese Journal of Lasers（2022）
摘要
Significance As the next big trend in the development oftheelectronicindustryflexibleelectronicsisabrandtechnologythatcanrevolutionizethefutureAtpresenttheapplicationresearchofflexibleelectronicdevicesmainlyfocusesonhumanhealthdetectionflexiblerobotandhuman-computerinteractionFlexibleelectronicdevicesarerealizedbycombiningsoftmaterialsandflexibleelectrodematerialstoachievehighflexibilityConventionalflexibleelectrodematerialssuchasstructuredmetalfilmsmetalnanoparticleswiresandconductivepolymerscannotmeethighstretchabilityandhighconductivitysimultaneouslyAsanewkindofflexibleelectrodematerialgallium-basedliquidmetalGa-LMwithhighelectricalconductivityandunlimitedstretchabilityhasbecomearesearchhotspotinrecentyearsGa-LMhasameltingpointbelow30 degrees CandthealmostnegligiblevaporpressureItisnon-toxictothehumanbodyandhastheexcellentconductivitythermalpropertymakingitanidealflexibleelectrodematerialGa-LMbasedflexibledevicesarefullyflexiblecomparedtotraditionalelectrodematerialswhichcanmaintaintheirelectronicperformancesevenunderlargeelasticdeformationThiswillleadtodramaticimprovementsintheperformanceofwearableelectronicsTheGa-LMcircuitsarecrucialforthepreparationofflexibleelectronicdevicesAlthoughresearchershaveproposedmanymethodstopreparetheGa-LMflexiblecircuitssuchasscreenprintinginjectionandspraypaintingtherestillremainproblemsoflimitedresolutionandintegrationofGa-LMcircuitsThereforetodevelopawayforthepreparationofminiaturizedhigh-integrationandmultifunctionalGa-LMflexibledevicesisofgreatinterestGa-LMpatterningisanecessarystepinthepreparationofGa-LMbasedflexibleelectronicdevicesHoweverthereexistsamajorchallengeinGa-LMpatterningduetoitsfluidityHencethepatterningmethodbytuningthewettabilityofGa-LMhasbeenextensivelyexploredinrecentyearsAsaprecisionmachiningmethodthelaserhasgoodprocessingadvantagesinpreparingvariousfunctionalsurfacesDuetoitshigh-powerdensitythelasercaninducemicronano-structuresonthesurfacesofvariousmaterialsandrealizethepreparationoffunctionalsurfacesGa-LMisfoundtoshowextremelyhighadhesiononthesmoothmaterialsurfacesandshowultra-lowadhesiononroughsurfacesSelectiveadhesionofGa-LMcanberealizedbyconstructingroughstructuresontheinitiallysmoothmaterialsurfacesoastorealizetheprintingofGa-LMcircuitsLasermachiningtechnologyhasadvantagesofnon-contacthigh-precisionandhigh-controllabilityprocessingwhichcanrealizethepreparationofhigh-resolutionandhigh-integrationLMcircuitsThecombinationoflasermanufacturingtechnologyandnewlyflexibleelectrodematerialscanachievehigh-performanceflexibleelectronicdevicesThisfieldisgrowingrapidlyanditisnecessarytoreviewandanalyzealltheseeffortstoguideitsfuturedevelopmentmorerationallyProgressTherecenteffortsinthefieldofGa-LMbasedflexibleelectronicdevicesfabricatedbyalaserare reviewedandthefutureresearchdirectionsareindicatedFirstthispaperintroducesthepatterningmethodbytuningthewettabilityofGa-LMThewettabilitymodelofGa-LMisanalyzedin-depthFig2ThenthecharacteristicsandadvantagesoflasermicromachiningaresummarizedaccordingtopreviouslyreportedstudiesAsaprecisionmachiningmethodthelaserisusedtopreparevariousfunctionalsurfacesandisoneofthemainmethodstotunethewettabilityofliquidsSubsequentlyrecentadvancesoftheGa-LM-basedflexibleelectronicsfabricatedbyalaserarecomprehensivelysummarizedTheresearchgroupfromtheSouthernUniversityofScienceandTechnologyhasrealizedthetenabilityofthewettabilityofGa-LMbylaserablationofnanoparticlesFig3TheresearchgroupfromXi????anJiaotongUniversityhasreportedamethodforinducingroughstructuresdirectlyonthesurfaceofthesubstratebyafemtosecondlasertochangethewettabilityofGa-LMontheoriginalsmoothsurfacefromtheoriginalhighadhesiontoultra-lowadhesionFig4Combining thehighprecisionmachiningcapabilityofthelaser withtheexcellentelectricalpropertiesofGa-LMonecanfabricateultra-flexibleelectronicdeviceswithhigh-resolutionmulti-functionandhigh-integrationIntheendtheapplicationsofGa-LMbasedflexibleelectronicsinhumanhealthmonitoringhuman-computerinteractionandsoftrobotsareelaboratedConclusionandProspectAsaprecisionmachiningtoolthelaserhasgoodprocessingadvantagesinpreparingvariousfunctionalsurfacesUsingalasertotunethewettabilityofGa-LMcanrealizethepreparationofGa-LMcircuitswithhighresolutionandhighintegrationthusgreatlyimprovingtheperformanceofGa-LMbasedflexibleelectronicdevicesGa-LMhasintrinsicadvantagesinthefieldofflexiblesensingandtheimprovementofsensorperformanceiscloselyrelatedtothepreparationofmicrostructuresUsingtheadvantagesoflaserprecisionpreparationofmicrostructurestorealizethesignificantimprovementoftheperformanceofGa-LMsensorwillbecomethekeyfactortopromotetheapplicationofGa-LMinthefieldofflexiblesensingThecombinationoflaserprecisionmachining with Ga-LM is believed to promote the rapid development of flexible electronics. eviewedandthefutureresearchdirectionsareindicatedFirstthispaperintroducesthepatterningmethodbytuningthewettabilityofGa-LMThewettabilitymodelofGa-LMisanalyzedin-depthFig2ThenthecharacteristicsandadvantagesoflasermicromachiningaresummarizedaccordingtopreviouslyreportedstudiesAsaprecisionmachiningmethodthelaserisusedtopreparevariousfunctionalsurfacesandisoneofthemainmethodstotunethewettabilityofliquidsSubsequentlyrecentadvancesoftheGa-LM-basedflexibleelectronicsfabricatedbyalaserarecomprehensivelysummarizedTheresearchgroupfromtheSouthernUniversityofScienceandTechnologyhasrealizedthetenabilityofthewettabilityofGa-LMbylaserablationofnanoparticlesFig3TheresearchgroupfromXi????anJiaotongUniversityhasreportedamethodforinducingroughstructuresdirectlyonthesurfaceofthesubstratebyafemtosecondlasertochangethewettabilityofGa-LMontheoriginalsmoothsurfacefromtheoriginalhighadhesiontoultra-lowadhesionFig4CombiningthehighprecisionmachiningcapabilityofthelaserwiththeexcellentelectricalpropertiesofGa-LMonecanfabricateultra-flexibleelectronicdeviceswithhigh-resolutionmulti-functionandhigh-integrationIntheendtheapplicationsofGa-LMbasedflexibleelectronicsinhumanhealthmonitoringhuman-computerinteractionandsoftrobotsareelaboratedConclusionandProspectAsaprecisionmachiningtoolthelaserhasgoodprocessingadvantagesinpreparingvariousfunctionalsurfacesUsingalasertotunethewettabilityofGa-LMcanrealizethepreparationofGa-LMcircuitswithhighresolutionandhighintegrationthusgreatlyimprovingtheperformanceofGa-LMbasedflexibleelectronicdevicesGa-LMhasintrinsicadvantagesinthefieldofflexiblesensingandtheimprovementofsensorperformanceiscloselyrelatedtothepreparationofmicrostructuresUsingtheadvantagesoflaserprecisionpreparationofmicrostructurestorealizethesignificantimprovementoftheperformanceofGa-LMsensorwillbecomethekeyfactortopromotetheapplicationofGa-LMinthefieldofflexiblesensingThecombinationoflaserprecisionmachiningwithGa-LM is believed to promote the rapid development of flexible electronics
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关键词
laser technique, liquid metal, lasers, wettability, patterning, flexible electronic devices
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