Research on Detection Technology of Inductively Coupled Plasma Optical Emission Spectrometer Based on Digital Micromirror Device

An experimental system on the basis of inductively coupled plasma optical emission spectrometer (ICP-OES)was built based on digital micromirror device (DMD),which was consisted of light source system, sample introduction system, echelle grating spectrometer and control system. The echelle grating spectrometer used echelle grating and reflective prism as the cross-dispersion elements, DMD as the spatial light modulator, and photomultiplier tubes (PMT) as the detector. The working parameters of the experimental system including control parameters of DMD, power of high frequency generator and flow rate of carrier gas were optimized. According to the experimental results of the emission lines, the limit of detection (LOD)was less than 0.05 mu g/ mL for Mg and 0.01 mu g/ mL for Ca, respectively. By analyzing the corresponding standard solution sample, the spiked recoveries and the RSDs were 98%-103% and 0.9% -1.8% for Mg, and 89%-93% and 0? 8%-0.9% for Ca, respectively. The experimental results showed that the ICP-OES based on DMD had the characteristics of flexible measurement and fast detection, realizing the function of detection and analysis.