MEMS Magnetic Field Source for Frequency Conversion Approaches for ME Sensors

Abstract Some magnetoelectric sensors require predefined external magnetic fields to satisfy optimal operation depending on their resonance frequency. While coils commonly generate this external magnetic field, a microelectromechanical systems (MEMS) resonator integrated with permanent magnets could be a possible replacement. In this proof-of-concept study, the interaction of a MEMS resonator and the ME sensor is investigated and compared with the standard approach to achieve the best possible sensor operation in terms of sensitivity. The achievable sensor sensitivity was evaluated experimentally by generating the magnetic excitation signal by a coil or a small-sized MEMS resonator. Moreover, the possibility of using both approaches simultaneously was also analysed. The MEMS resonator operated with 20Vppat 1.377 kHz has achieved a sensor sensitivity of 221.21mV/T. This sensitivity is comparable with the standard approach, where only a coil for sensor excitation is used. The enhanced sensitivity of 277.0mV/T could be identified by generating the excitation signal simultaneously by a coil and the MEMS resonator in parallel. In conclusion, these MEMS resonator methods can potentially increase the sensitivity of the ME sensor even further. The unequal excitation frequency of the MEMS resonator and the resonance frequency of the ME sensor currently limit the performance. Furthermore, the MEMS resonator as a coil replacement also enables the complete sensor system to be scaled down. Therefore, optimizations to match both frequencies even better are under investigation.