Lead-free KNN-based thin films obtained by pulsed laser deposition

In this work, $0.96(\mathrm{K}_{0.48}\mathrm{N}\mathrm{a}0.52)_{0.95}\mathrm{L}\mathrm{i}_{0.05}\mathrm{N}\mathrm{b}_{0.94}\mathrm{S}\mathrm{b}_{0.06} \mathrm{O}_{3-}0.04\mathrm{B}\mathrm{a}0.94\mathrm{C}\mathrm{a}_{0.06} \mathrm{Z}\mathrm{r}\mathrm{O}_{3}$ (KNLNS-BCZ) and 0. $9\mathrm{S}(\mathrm{K}_{0.48}\mathrm{N}\mathrm{a}0.52)_{0.95}\mathrm{L}\mathrm{i}_{0.05}\mathrm{N}\mathrm{b}_{0.95}\mathrm{S}\mathrm{b}_{0.05}\mathrm{O}_{3-}0.02\mathrm{B}\mathrm{a}0.5(\mathrm{B}\mathrm{i}_{0.5}\mathrm{N}\mathrm{a}0.5)_{0.5}\mathrm{Z}\mathrm{r}\mathrm{O}_{3}$ (KNLNS-BBNZ) ferroelectric thin films were obtained by pulsed laser deposition. The structural, and morphological characteristics were studied to determine the best deposition parameters and analyse the piezoelectric properties. The studied deposition parameters were temperature, laser fluence, oxygen partial pressure and frequency. These parameters impact important characteristics of the thin films like grain morphology, thickness, and roughness. KNLNS-BCZ thin films with pure perovskite structure, homogeneous grain growth, and thickness $\geq 100$ nm were fabricated at $700^{\circ}\mathrm{C}, 2\mathrm{J}/\mathrm{c}\mathrm{m}^{2},300$ mTorr, and frequencies of 5 Hz and 10 Hz. These films presented good ferroelectric behaviour and piezoelectric coefficient d 33eff of 83.80 pm/V and 25.80 pm/V, respectively.