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Design of Optical Gyroscope Based on the Cavity Optomechanics Structure

2022 Photonics &amp Electromagnetics Research Symposium (PIERS)(2022)

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摘要
Micro-electromechanical systems (MEMS) technologies allow the reduction of mass and manufacture of gyroscopes, which demonstrate the features of small volume, low consumption of power, high trustiness, and easy integration with many applications, as a device for measuring the angular velocity of moving objects. In order to optimize the sensing performance, we designed a new model of a micro-gyroscope based on a photonic crystal optomechanical cavity. The proposed micro-gyroscope has the following functional features, according to modeling results: operating bandwidth 10 Hz, mechanical sensitivity $d y / d \Omega\ \text { of }\ 0.340 \mathrm{~nm} /(^\circ / \mathrm{s})$, optomechanical sensitivity $d \omega_{\text {sense}} / d \Omega$ is $2.09 \mathrm{kHz} /(^\circ / \mathrm{s})$, and measurement range is $\pm 33.12(^\circ / \mathrm{s})$.
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关键词
photonic crystal optomechanical cav-ity,microgyroscope,functional features,operating bandwidth 10 Hz,optome-chanical sensitivity dω,optical gyroscope,cavity optomechanics structure,microelectromechanical systems,MEMS,high trustiness,angular velocity,moving objects,sensing performance,we,frequency 10.0 Hz,size 0.34 nm,frequency 2.09 kHz
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