Simulation of millimeter-sized microwave plasma discharge generator under various conditions

A microwave plasma generator (MPG) of a sub-millimeter scale might be suitable for biomedical applications. However, there are still many unknowns regarding the MPG discharge behavior at this scale and specific conditions. A two-dimensional MPG model at the millimeter scale and its simulation and relative calculation in the COMSOL Multiphysics software are presented. A MPG filled with argon and helium is simulated, respectively. The frequency of a microwave source of about 5 GHz is considered. The number density and temperature of electrons as well as chemical composition are obtained at different power and pressure conditions. The electron density peaks slightly downstream of the crossing point, and the electron density is slightly asymmetrically in the y-plane due to the fact that the electromagnetic waves are absorbed asymmetrically. The electron temperature is relatively low everywhere, in part, due to the high operating pressure. The electron temperature peaks directly underneath the wave guide where the wave is absorbed. The electron density increases with the increase in the internal pressure and the input power of the MPG, the electron temperature decreases with the increase in the internal pressure of the MPG, but the electron temperature cannot be affected by the input power change of MPG. The amount of excited Ar+ and Ars (metastable atom) increases with the increase in the input power and pressure of MPG, but the amount of excited Ar almost remained unchanged. In addition, the amount of excited He almost remained unchanged, while the amount of excited He+, Hes (metastable atom), and He-2(+) increased with the increase in the input power and pressure of MPG. The simulation results of this model are thus informative for understanding the physical characteristics of millimeter-sized MPG, and it will provide a solid basis for the future development of such hardware in small plasma capsules for cancer therapy. (C) 2022 Author(s).