A robust high-performance electronic synapse based on epitaxial ferroelectric Hf0.5Zr0.5O2 films with uniform polarization and high Curie temperature

Applied Materials Today(2022)

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摘要
•Ferroelectric tunnel junction (FTJ) device based on epitaxial Hf0.5Zr0.5O2 (HZO) films was fabricated, allowing excellent electronic synaptic behaviors and high accuracy of 93.7% for MNIST database recognition.•The high-performance of the device has been in-depth understood and correlated to the uniform polarization and high remnant polarization (25 µC/cm2) of HZO films.•The Curie temperature of 930 °C of HZO films was reported while the strain relaxation-related phase transition and the conduction mechanism of the FTJ have also been thoroughly clarified.
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关键词
Epitaxial HZO,FTJs,Polarization,STDP,Artificial synapses
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