High-Q Silicon-Germanium Ring Resonator for On-Chip Sensing Applications in the Mid-Infrared

Marko Perestjuk,Rémi Armand,Alberto Della Torre,Milan Sinobad,Arnan Mitchell,Andreas Boes,Jean-Michel Hartmann,Jean-Marc Fedeli,Vincent Reboud,Christelle Monat,Christian Grillet

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)（2022）

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摘要

We report a high-Q ring resonator in a silicon-germanium on silicon chip-based platform for sensing applications in the mid-infrared. The side-coupled ring exhibits a loaded Q-factor of 90,000 at the operating wavelength around 4.18 µm.

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关键词

silicon-germanium,on-chip,mid-infrared

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