Femtosecond laser micromachining for stress-based figure correction of thin mirrors

The fabrication of a large number of high-resolution thin-shell mirrors for future space telescopes remains challenging, especially for revolutionary mission concepts such as NASA's Lynx X-ray Surveyor. It is generally harder to fabricate thin mirrors to the exact shape than thicker ones, and the coatings deposited onto mirror surfaces to increase the reflectivity typically have high intrinsic stress that deforms the mirrors further. Since the rapid development of femtosecond laser technologies over the last few decades has triggered wide applications in materials processing, we have developed a mirror figure correction and stress compensation method using a femtosecond laser micromachining technique for stress-based surface shaping of thin-shell x-ray optics. We employ a femtosecond laser to selectively remove regions of a stressed film that is grown onto the back surface of the mirror, to modify the stress states of the mirror. In this paper, we present experimental results to create both isotropic and anisotropic stress states on thin flat silicon mirrors with thermal oxide (SiO2) films using femtosecond lasers. We show that equibiaxial stress can be generated through uniformly micromachined holes, while non-equibiaxial stress arises from the ablation of equally spaced troughs. We also present results from strengt h tests to show how this process minimally affects the strength of mirrors. These developments are beneficial to the high-throughput correction of thin-shell mirrors for future space-based x-ray telescopes. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement