Plasma fireball-mediated ion implantation for nonvolatile memory application

Sudheer,Vivek Pachchigar,Biswarup Satpati,Sooraj KP,Sebin Augustine,Sukriti Hans,Mukesh Ranjan

Applied Surface Science（2023）

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摘要

•Demonstration of plasma fireball for low-cost oxygen ion implanter.•One-step fabrication of high-density non-volatile memory devices.•Dual-use of the single metallic film: Resistive switching layer and electrode.•Rapid fabrication of periodic arrays of squared memory cells.

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关键词

Nonvolatile memory,Resistive switching,Conductive atomic force microscopy,Memristor,Functional oxide,Ion-implantation

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