Physics-Based Compact Model of Current Stress-Induced Threshold Voltage Shift in Top-Gate Self-Aligned Amorphous InGaZnO Thin-Film Transistors
IEEE Electron Device Letters(2022)
摘要
Threshold voltage shift (
$\Delta {V}_{\text{T}}$
) under various current stress (CS) conditions need to be quantitatively studied in self-aligned top-gate amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Here, we propose a stretched-exponential function (SEF)-based
$\Delta {V}_{\text{T}}$
model that can be applied to various combinations of
${V}_{\text{GS}}$
and
${V}_{\text{DS}}$
. The proposed model indicates the characteristic electron trapping time constant
$\tau _{1}$
is inversely proportional to (
${V}_{\text{GS}} - {V}_{\text{T}}$
). In contrast, the time constant
$\tau _{2}$
is directly proportional to the square root of (
${V}_{\text{DS}}+{V}_{\text{bi}}$
), presumably due to the local donor creation by a lateral electric field. The proposed model was verified experimentally in various
${V}_{\text{GS}}$
and
${V}_{\text{DS}}$
configurations. Further, it is confirmed that the lateral electric field dominantly influences donor creation near the drain.
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关键词
InGaZnO thin-film transistors,self-aligned top-gate structure,current stress,electron trapping,donor creation
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