Optimization of Electrostatic Bending-Plate Actuators: Increasing the Displacement and Adjusting the Actuator Stiffness

We present the interaction of the geometrical actuator design with the voltage-displacement characteristics, the displace-ment range, and the pull-in behaviour of electrostatic bending-plate actuators. Electrostatic COMSOL Multiphysics simulations are performed and the geometrical influence of the actuator is determined experimentally. Actuators with sinus-oidal electrodes are introduced and the suitability of the analytic model for these actuators is evaluated. The sinusoidal electrode design reduces the pull-in voltage due to an increased electrode surface and a reduced actuator stiffness.