Directional Behavior of Periodic Honeycombs: Towards Lightweight MEMS on SOI Wafers

In this paper we present the mechanical behavior of geometric structures with honeycomb, square, circle, triangle, hexagon and parallelogram shape. For comparison, the design of the unit cell shapes is defined with the characteristic length lc and the edge width a. These structures are arranged periodically in a square simulation model in a dimension of 20l 2/c . The results of the stiffness and shear stress simulations in x- and y-direction in COMSOL multiphysics and the material free surface areas show the benefits of honeycombs in lightweight MEMS on SOI wafers. Furthermore, the directional behavior of parallelogram structures with different angles is presented.