In-situ Versatile Characterization of Carbon NanoTubes using Nanorobotics

Cédric Clévy,Bruno Sauvet,Jean-Yves Rauch,Olivier Lehmann,François Marionnet,Philippe Lutz, Lorenzo Beccacece,Stéphane Xavier,Raphael Aubry,Afshin Ziaei, Claude Prévot,Guillaume J. Laurent

2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)（2019）

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摘要

The paper investigates electrical characterizations of CNTs (carbon nanotubes) within a SEM chamber. The originality of the proposed approach relies in its high versatility that is made possible thanks to nanoprobes moved by 6-DoF nanopositioning robots. Using this configuration, the influence of several factors are evaluated to know the electrical behavior of the measurement system. The paper presents several experimental characterizations of CNTs. The measured values of electrical resistance are in complete agreement with known results from the literature but were obtained in a much more versatile way.

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关键词

carbon nanotubes,nanorobotics,SEM chamber,6-DoF nanopositioning robots,electrical behavior,measurement system,electrical resistance,versatile characterization,electrical characterizations,CNTs

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