Microfiber acoustic sensor based on diaphragm structure

A micro fiber acoustic sensor based on diaphragm structure is proposed. The thinnest waist region of microfiber was attached to the diaphragm surface by van der Waals' force to realize the packaging. Under the sound pressure level of 85 dB, the detection of 60–1000 Hz acoustic signal was realized. Finally, the vector sensing characteristic of acoustic signals was studied. The proposed microfiber acoustic sensor can respond to acoustic signals in the angle range of 324°-36° and 144°-216°.