Impact of substrate resistivity on spiral inductors at mm-wave frequencies

Lucas Nyssens,Martin Rack,Christoph Schwan,Zhixing Zhao,Steffen Lehmann,Tom Hermann,Frederic Allibert,Cécile Aulnette,Dimitri Lederer,Jean-Pierre Raskin

Solid-State Electronics（2022）

引用 2|浏览16

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摘要

•Parasitic surface conduction of high-resistivity substrates degrades quality factor of inductors.•RF inductors quality factor strongly improves with high-resistivity substrate.•mm-wave inductors need re-design for large gain in quality factor with high-resistivity substrate.

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关键词

Spiral inductor,mm-Wave,FD-SOI CMOS

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