Correlated reflectance and Raman spectroscopy in substrates with coherent transparent layers

Intensity of Raman bands in substrates covered with transparent overlayers can be enhanced due to optical interference, leading to incorrect quantitative interpretation of Raman signals. If thickness and optical properties of the overlayer are known, correction can be done using appropriate models. We theoretically discuss and experimentally evaluate a model where thickness and refractive index of the overlayer remain unknown and determination of enhancement factor is possible via linear relationship to reflectance-related response of the whole structure. Correct interpretation of the spectra is then possible since refractive index and thickness of the transparent layer are implicitly introduced in the measured reflectance. For experimental evidence we exploit SiNx/Si and SiO2/Si structures to find a significant correspondence with the model, aiming toward correlative reflectance and Raman spectroscopy.