Design of a MEMS-Based Fully Passive Wireless Pressure Sensor for Harsh Environments

In this paper, we propose a novel passive and wireless pressure sensor for harsh environment applications, combining a MEMS pressure sensor with a UHF antenna. The sensor is based on a membrane that deflects under external pressure, modifying its capacitance and therefore the resonant frequency of the antenna. Here we present the modelling and codesign of the sensor and the antenna and we propose a 200 mm fabrication process in the CEA-Leti clean room. From analytical models and simulations, we show a theoretical sensitivity up to 9.8% of antenna resonant frequency variation per bar.