Engineering Optical Materials Using Focused Ion Beams

Hongyan Mei,Alexander Koch,Chenghao Wan,Jad Salman,Jura Rensberg,Zhen Zhang,Martin Hafermann,Raymond Wambold,Shriram Ramanathan,Carsten Ronning,Mikhail A. Kats

OSA Advanced Photonics Congress 2021（2021）

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摘要

We demonstrate modulation of the carrier concentration in zinc oxide and the phase-transition characteristics of vanadium dioxide using a commercial focused ion beam system, providing a simple and broadly applicable route towards reconfigurable infrared optics.

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