First Demonstration of High-Sensitivity (NEP<1fW•Hz^-1/2) Back-Illuminated Active-Matrix Deep UV Image Sensor by Monolithic Integration of Ga₂O₃ Photodetectors and Oxide Thin-Film-Transistors

2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)（2022）

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First Demonstration of High-Sensitivity (NEP<1fW•Hz-1/2) Back-Illuminated Active-Matrix Deep UV Image Sensor by Monolithic Integration of Ga2O3 Photodetectors and Oxide Thin-Film-Transistors