Thin Film Surface Reconstruction from Interferometry Curvature Measurements

Fernando Soria, Andrew Fordon,Yunjun Xu,Shawn Putnam

2022 IEEE Research and Applications of Photonics in Defense Conference (RAPID)（2022）

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摘要

This work presents a new technique for surface reconstruction based on curvature measurements. The method is robust in the geometries it can handle while also exhibiting processing times of 131 milliseconds for a 768x768 pixel image.

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关键词

Curvature,Interferometry,Thin Film

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