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3D Optical Microresonators: Laser-Assisted Fabrication and Packaging

MikroSystemTechnik 2017; Congress(2017)

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摘要
We investigate the fabrication and package of three-dimensional (3D) optical microresonators, especially bottle microresonator (BMR) structures. They are unique structures that possess radial confinement, but also axial confinement of the whispering gallery modes (WGMs) caused by their bulge shape. A laser-assisted fabrication process is proposed to manufacture BMRs from silica optical fibers with a diameter and bottle length of 215 micrometer and 758 micrometer, respectively. The corresponding WGMs of BMRs are measured using a tapered fiber where quality (Q) factors on the order of 105 at 1550 nm wavelength are found. The BMR and tapered fiber are assembled into a compact glass package made with 2.5D laser-assisted structuring technology. This device presents potential features such as low-cost, ease of fabrication and thermal, optical and mechanical stability due to the glass material.
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