Characterization and Monitoring Platform for Single-Photon Avalanche Diodes in the Development of a Photon-to-Digital Converter Technology

Samuel Parent,Frederic Vachon,Valerie Gauthier, Alexandre Paquette,Jacob Deschamps,Tommy Rossignol,Philippe Arsenault,Caroline Paulin, Joel Lemay,Nicolas Roy,Maxime Cote, Denis Dupont,Stephane Martel,Henri Dautet,Serge A. Charlebois,Jean-Francois Pratte

2022 IEEE 34TH INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)（2022）

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摘要

This paper reports on a wafer-level test platform for Single-Photon Avalanche Diodes (SPADs) manufactured at Teledyne DALSA (Canada) and designed by Université de Sherbrooke. The platform enables in-foundry end-of-process active testing of SPADs in Geiger-mode, thanks to a dedicated integrated circuit and probe card installed on a wafer prober.

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关键词

Single-Photon Avalanche Diodes,Wafer Probing,Photon-to-Digital Converter,Characterization and Monitoring

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