34.4: 3‐inch, 3000‐ppi Silicon Nitride Masks for Direct Patterning of OLED Microdisplays

Shou-Cheng Dong,Sunbin Deng, Jiye Yang,Yibin Jiang,Ching W. Tang

Digest of technical papers（2022）

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摘要

3‐inch, 3000‐ppi silicon nitride masks (SiNMs) have been achieved for the direct patterning of ultrahigh‐resolution RGB side‐by‐side OLED microdisplays.

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